In this work, thin film of silver nanoparticles for humiditysensor application was deposited by electrostatic spray deposition technique.
The influence of the deposition times on properties of films was studied. The
crystal structures of sample films, their surface morphology, and optical
properties have been investigated by X-ray diffraction (XRD), field emission
scanning electron microscopy (FE-SEM), and UV-VIS spectrophotometer,
respectively. The crystalline structure of silver nanoparticles thin film was
found in the orientation of (100) and (200) planes of cubic structure at
diffraction angles 2θ = 38.2° and 44.3°, respectively. Moreover, the silver
nanoparticles thin films humidity sensor was fabricated onto the interdigitated
electrodes. The sensor exhibited the humidity adsorption and desorption
properties. The sensing mechanisms of the device were also elucidated by
complex impedance analysis.
The humidity measurement is essential in a wide range of
industrial applications including the pharmaceutical, food, medicine, and
electronics industries. Some humidity sensors have been developed based on a
reversible interaction between a material and water vapor, hence acting as a
gas sensor. Existing humidity sensing methodologies also rely upon optical,
gravimetric, capacitive, resistive, piezoresistive, and magnetoelastic
properties of selected materials. Recently, it is reported that the use of
nanostructures, such as nanoparticles, nanowire, nanotubes, and polymer
nanocomposites, as the humidity sensing materials could enhance the performance
of humidity sensors greatly. For these nanostructured materials, the surface
effect becomes dominant due to their large surface-to-volume ratio, which is
beneficial to construct the humidity sensors and the gas sensors.
In the past few years, electrostatic spray deposition (ESD)
technique has been used to prepare a variety of functional materials thin
films. Compared with other film fabrication techniques, ESD is a simple set-up
process, low cost, a wide choice of precursors, relatively large film growth
rate, ambient atmosphere operation, and a good control of the morphology of the
deposited layers. The ESD technique was used so far to deposit thin films of
functional materials with application in different fields, that is,
rechargeable lithium batteries, solid oxide fuel cells, heat exchange reactors,
biomedical implants, and sensors.
In this paper, we report the preparation of silver
nanoparticles (Ag NPs) thin film by ESD technique. The structural, optical
properties and surface morphology were investigated for using for the humidity
sensor application. The sensing mechanism of the Ag NPs device was performed by
the complex impedance analysis.
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