SnO2-based semiconductor gas sensors have been
successfully fabricated and tested for detecting carbon monoxide and methane.
The sensitivity and selectivity of the sensors, as two
important parameters in these devices, are tailored by incorporation of
different additives. While platinum enhances the sensor response to CH 4,
cerium-oxide suppresses its sensitivity in favor of carbon monoxide.
The effect of operating temperature on the performance of
sensors is reported. Lowering the operating temperature allows integration of
such gas detectors on silicon membranes
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