The mass flow sensor is suitable both for gases and for liquids and can be used for the
direct measurement in the flow range of 0 to 2 slpm (standard liters per
minute).
The
solution uses a thermal process as a measuring principle: it consists of a
heating element and two differentially arranged thermocouples. The
temperature gradient is a measure of the flow rate. In contrast to the
conventional technology come directly from the heating element and sensing
resistors with the medium to be measured in contact, it is characterised in
that the sensor element is completely inside a monolithic
semiconductor. Hence the media touches only the durable protective layer
of the sensor, and so is protected from contamination, condensation and
abrasion.
The
SiF2011 consists of a compatible to standard medical flow housing and a PCB
with the complete signal conditioning. The sensor provides both an analog
output (0 to 5V) and a digital I2C interface, is characterised by a short
response time (<8 ms) and is in the extended temperature range of -25 ° C to
+ 85 ° C. For convenient evaluation of the demonstration kit SiF3011 is
available.
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