A model of the transient response of a semiconductor gas sensor under modulation heating has been successfully constructed.
The model consists of the heat conduction process from the
heater to the sensor surface, the reaction process on the sensor surface, and
the diffusion process near the sensor surface which provides a supply of
flammable gas.
The calculated sensor response agreed well with experimental
results obtained with a pulsed power supply to the heater. Because we can
predict the sensor transient response, the model will be useful in
distinguishing kinds of gases and odors by using the transient response of
semiconductor gas sensors.
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