A new class of optical oxygen sensor that can be photo patternable by
traditional UV lithography is presented. They are fabricated using photo patternable
spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent
dyes.
It has a good adhesion property and can be applied on glass or on
photopolymer (SU-8) without any additional surface treatments. The optimum
mixture composition for patternable oxygen sensitive membranes is investigated
and its optical properties are characterized.
Proof-of-concepts for two applications, intensity-based oxygen sensing
with SU-8 based structure and self-calibration fluidic oxygen sensor, are
described. These photo patternable optical membranes will find many
applications wherever small patterns of oxygen sensitive membranes are
required.
没有评论:
发表评论