A new family of electrochemical gas sensors based on the use of thin
and thick film technologies has been under study in our Laboratory for
some years. This microelectronics approach allowed us to design solid
state devices for oxygen and hydrogen detection. Our experimental
results evince two major interests, besides those associated with sensor
miniaturization, lower price, reliability, etc.:
(1) Wide
variety of available materials and substances, local modification of
their composition and associated properties using techniques such as
thermal diffusion and ion implantation.
(2) Possible creation of
complex functions using different multi-layered geometries; for example,
the catalytic activity of a platinum electrode, for the CO/O2 reaction,
may be modified by changing thickness, texture and partial capping of
this electrode.
Two types of new sensors using this approach are
described: a zirconia-based oxygen sensor for combustion control and a
hydrogen sensor working at room temperature. The experimental behaviour
of these devices is presented and discussed.
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