This paper describes a process for the layer-by-layer fabrication and
integration of luminescent dye-based optical oxygen sensors into
microfluidic devices. Application of oxygen-sensitive platinum(ii)
octaethylporphyrin ketone fluorescent dye dissolved in polystyrene onto
glass substrates by spin-coating was studied.
Soft lithography with polydimethylsiloxane (PDMS) stamps and reactive
ion etching in oxygen plasma were used to produce sensor patterns with a
minimum feature size of 25 microm. Sensors patterns were integrated
into a PDMS microfluidic device by plasma bonding. No degradation of the
sensor response as a result of the lithography and pattern-transfer
processes was detected. Gaseous and dissolved oxygen (DO) detection was
characterised using fluorescence microscopy. The intensity signal ratio
of the sensor films was found to increase almost two-fold from 3.6 to
6.8 by reducing film thickness from 1.3 microm to 0.6 microm.
Calibration of DO measurement showed linear Stern-Volmer behaviour that
was constant for flow rates from 0.5 to 2 mL min(-1). The calibrated
sensors were subsequently used to demonstrate laterally resolved
detection of oxygen inside a microfluidic channel. The fabrication
process provides a novel, easy to use method for the repeatable
integration of optical oxygen sensors into cell-culture and
lab-on-a-chip devices.
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