Soft-lithography and plasma etching with reactive ions were used to
fabricate a polymer microfluidic cell-culture bioreactor with integrated optical oxygen sensor. Platinum (II) octaethylporphyrin ketone (PtOEPK)
suspended in a microporous polystyrene (PS) matrix was spin-coated to
form sensor films of variable thickness from 1.1 µm to 400 nm on glass
substrates.
Sensor films were found to be smooth and well adhered. Arbitrary
patterns with a minimum feature size of 25 µm could be routinely
replicated in the PtOEPK/PS layer using polydimethylsiloxane (PDMS)
elastomer stamps as etch masks in a reactive ion etcher. No effect of
plasma patterning and sensor integration by plasma bonding on the sensor
signal could be observed.
Detection of different gaseous and dissolved oxygen concentrations with
the patterned sensor followed linear Stern-Volmer behavior. Dynamic
measurement of sensor intensity as a function of different oxygen
concentration showed good reproducibility and a nearly instantaneous
response to gas changes. For gaseous and dissolved oxygen measurement
with a patterned 400 nm thick film I0/I100 ratios of 3.2 and 2.7 were
found, respectively.
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